潔凈度級別
|
塵粒最大允許數/立方米
≥0.5μm塵粒數
|
≥5μm塵粒數
|
微生物最大允許數
浮游菌/立方米
|
沉降菌/皿
|
100級
|
3,500
|
0
|
5
|
1
|
10,000級
|
350,000
|
2,000
|
100
|
3
|
100,000級
|
3,500,000
|
20,000
|
500
|
10
|
300,000級
|
10,500,000
|
60,000
|
1000
|
15
|
空氣潔凈
度等級(N)
|
大于或等于所標粒徑的粒子最大濃度限值(空氣粒子數個/立方米)
|
|||||
0.1um
|
0.2um
|
0.3um
|
0.5um
|
1.0um
|
5.0um
|
|
ISO Class1
|
10
|
2
|
||||
ISO Class2
|
100
|
24
|
10
|
4
|
||
ISO Class3
|
1,000
|
237
|
102
|
35
|
8
|
|
ISO Class4
|
10,000
|
2,370
|
1,020
|
352
|
83
|
|
ISO Class5
|
100,000
|
23,700
|
10,200
|
3,520
|
832
|
29
|
ISO Class6
|
1,000,000
|
237,000
|
102,000
|
35,200
|
8,320
|
293
|
ISO Class7
|
352,000
|
83,200
|
2,930
|
|||
ISO Class8
|
3,520,000
|
832,000
|
29,300
|
|||
ISO Class9
|
35,200,000
|
8,320,000
|
293,000
|
|||
注:由于涉及測量過程的不確定性,故要求用不超過三個有效的濃度數字來確定等級水平
|
個/M≥0.5um
|
ISO
14644-1(1999)
|
US
209E(1992)
|
US
209D(1988)
|
EEC
cGMP(1989)
|
FRANCE
AFNOR(1981)
|
GERMANY
VDI 2083(1990)
|
JAPAN
JAOA(1989)
|
1
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
3.5
|
2
|
-
|
-
|
-
|
-
|
0
|
2
|
10.0
|
-
|
M1
|
-
|
-
|
-
|
-
|
-
|
35.3
|
3
|
M1.5
|
1
|
-
|
-
|
1
|
3
|
100
|
-
|
M2
|
-
|
-
|
-
|
-
|
-
|
353
|
4
|
M2.5
|
10
|
-
|
-
|
2
|
4
|
1,000
|
-
|
M3
|
-
|
-
|
-
|
-
|
-
|
3,530
|
5
|
M3.5
|
100
|
A+B
|
4,000
|
3
|
5
|
10,000
|
-
|
M4
|
-
|
-
|
-
|
-
|
-
|
35,300
|
6
|
M4.5
|
1,000
|
1,000
|
-
|
4
|
6
|
100,000
|
-
|
M5
|
-
|
-
|
-
|
-
|
-
|
353,000
|
7
|
M5.5
|
10,000
|
C
|
400,000
|
5
|
7
|
1,000,000
|
-
|
M6
|
-
|
-
|
-
|
-
|
-
|
3,530,000
|
8
|
M6.5
|
100,000
|
D
|
4,000,000
|
6
|
8
|
10,000,000
|
-
|
M7
|
-
|
-
|
-
|
-
|
-
|
空氣潔凈度等級 (N)
|
大于或等于表中粒徑的最大濃度限值(pc/m³)
|
|||||
0.1um
|
0.2um
|
0.3um
|
0.5um
|
1um
|
5um
|
|
1
|
10
|
2
|
||||
2
|
100
|
24
|
10
|
4
|
||
3
|
1000
|
237
|
102
|
35
|
8
|
|
4(十級)
|
10000
|
2370
|
1020
|
352
|
83
|
|
5(百級)
|
100000
|
23700
|
10200
|
3520
|
832
|
29
|
6(千級)
|
1000000
|
237000
|
102000
|
35200
|
8320
|
293
|
7(萬級)
|
352000
|
83200
|
2930
|
|||
8(十萬級)
|
3520000
|
832000
|
29300
|
|||
9(一百萬級)
|
35200000
|
8320000
|
293000
|